| AVS 64th International Symposium & Exhibition | |
| Manufacturing Science and Technology Group | Thursday Sessions |
| Session MS-ThA |
| Session: | Working with Government Labs and User Facilities |
| Presenter: | Chen Zhang, National Institute of Standards and Technology, Center for Nanoscale Science and Technology |
| Authors: | V.K. Luciani, National Institute of Standards and Technology, Center for Nanoscale Science and Technology C. Zhang, National Institute of Standards and Technology, Center for Nanoscale Science and Technology |
| Correspondent: | Click to Email |
The NIST Center for Nanoscale Science and Technology (CNST) supports the U.S. nanotechnology enterprise from discovery to production. As part of the CNST, the shared-use NanoFab provides its users rapid access to a comprehensive suite of tools and processes for nanoscale fabrication and measurement. The CNST NanoFab at NIST is part of the Department of Commerce and therefore puts a high priority on operating a business friendly, easily accessible facility. The same rates are applied to all users, whether from industry, academia or NIST. Applications are accepted at any time and are reviewed and processed every week. Also, NIST does not claim any inherent rights to inventions made in the course of a NanoFab project. Your intellectual property rights are not affected. The NanoFab features a large, dedicated facility, with tools operated within an ISO 5 (class 100), 750 m2 (8,000 ft2) cleanroom and in adjacent laboratories that have superior air quality along with temperature, humidity, and vibration control. Over 80 major process tools are available, including but not limited to e-beam lithography, 5x reduction stepper photolithography, nano-imprint lithography, laser writing for mask generation, scanning and transmission electron microscopy, three Focused Ion Beam (FIB) systems, metal deposition, plasma etching, chemical vapor deposition, atomic layer deposition, deep silicon etching, ion beam etching and a soft-lithography lab. The NanoFab staff consists of scientists, engineers and technicians that specialize in all areas of nanofabrication and provide training and ongoing technical assistance to users. Our goal is to be a catalyst to our users’ success and to help nurture nanotechnology commerce in the Unites States. Project applications and instructions are easily available on the web at www.nist.gov/cnst/nanofab. Users inside NIST and from all around the country are provided on-line access to tool schedules and the tool reservation system. From physicists, engineers and biologists to medical researchers, users find common ground at the nanoscale in the CNST NanoFab.