AVS 64th International Symposium & Exhibition
    MEMS and NEMS Group Monday Sessions
       Session MN+EM+NS-MoA

Invited Paper MN+EM+NS-MoA3
Coupling Piezoelectric MEMS to Cavity Optomechanics

Monday, October 30, 2017, 2:20 pm, Room 24

Session: Nano Optomechanical Systems/Multiscale Nanomanufacturing
Presenter: Kartik Srinivasan, NIST
Correspondent: Click to Email

Establishing a link between the radio frequency (RF) and optical domains is a topic of relevance to a variety of applications in communications, metrology, and photonic quantum information science. Acoustic wave devices represent an opportunity to mediate such transduction in a chip-integrated format. The approach we are pursuing uses materials that are both piezoelectric, to couple RF waves to strain fields, and photoelastic, to couple strain fields to optical waves.

One architecture that we have recently explored is based on exploiting these effects in GaAs. First, interdigitated transducers (IDTs) convert 2.4 GHz RF photons into 2.4 GHz propagating surface acoustic waves. These acoustic waves are routed through phononic crystal waveguides and are coupled to a nanobeam optomechanical cavity that supports both a highly localized 2.4 GHz breathing mechanical mode and a high quality factor 1550 nm optical mode. In contrast to non-resonant excitation of photonic structures with IDTs, here the phononic waveguide preferentially excites a localized mechanical mode, which in turn strongly interacts with the optical mode through the photoelastic effect. Finally, the optical mode can be out-coupled or excited via an optical fiber taper waveguide. Using this platform, we demonstrate preparation of the breathing mode in a coherent state at any location in phase space, and optically read out an average coherent intracavity phonon number as small as one-twentieth of a phonon. In the time-domain, we show that RF pulses are mapped to optical pulses, forming a resonant acousto-optic modulator with a sub-Volt half-wave voltage. We also observe a novel acoustic wave interference effect in which RF-driven motion is completely cancelled by optically-driven motion, enabling the demonstration of interferometric opto-acoustic modulation in which acoustic wave propagation is gated by optical pulses.

While the above platform has been shown to provide a coherent interface between the RF, optical, and acoustic domains, the overall efficiency is limited by imperfect matching across the various interfaces, e.g., IDT-to-phononic crystal waveguide, etc. In the final part of my talk, I will outline efforts to improve upon the transduction efficiency of the system.