AVS 64th International Symposium & Exhibition | |
MEMS and NEMS Group | Monday Sessions |
Session MN+EM+NS-MoA |
Session: | Nano Optomechanical Systems/Multiscale Nanomanufacturing |
Presenter: | Igor Bargatin, University of Pennsylvania |
Correspondent: | Click to Email |
Recently, my group has demonstrated a new class of ultra-lightweight plate-shaped mechanical metamaterials, which we named "plate mechanical metamaterials". Using a periodic three-dimensional patterning, we fabricated free-standing plates up to 1 cm in size out of aluminum oxide (alumina) films as thin as 25 nm. Weighing as little as 0.1 gram per square meter, they are among the thinnest and lightest freestanding solids that can be handled with bare hands. We also combined multiple ultrathin layers of alumina to create a nanoscale analog of paper-based corrugated cardboard. Unlike cardboard, these plates have the ability to “pop back” to their original shape, without damage, even after undergoing multiple sharp bends by more than 90 degrees.
Like the nanotruss -based mechanical metamaterials reported by other groups, plate mechanical metamaterials are extremely lightweight and resilient due to their nanoscale thickness and microscale cellular structure. However, in contrast to the cube-shaped metamaterials that typically form a lattice easily penetrated by the ambient air, our plates form flat continuous plates. Ultralow weight, mechanical robustness, thermal insulation, as well as chemical and thermal stability of alumina make plate metamaterials attractive for numerous applications, including structural elements in flying microrobots, high-temperature thermal insulation in energy converters, testing of nanoscale strength enhancement, new types of optical and acoustic metamaterials, as well as ultrathin MEMS/NEMS sensors and ultra-lightweight hollow MEMS/NEMS resonators.