AVS 64th International Symposium & Exhibition
    MEMS and NEMS Group Monday Sessions
       Session MN+EM+NS-MoA

Invited Paper MN+EM+NS-MoA1
GHz Integrated Acousto-Optics

Monday, October 30, 2017, 1:40 pm, Room 24

Session: Nano Optomechanical Systems/Multiscale Nanomanufacturing
Presenter: Mo Li, University of Minnesota
Correspondent: Click to Email

Integrating nanoscale electromechanical transducers and nanophotonic devices potentially can enable new acousto-optic devices to reach unprecedented high frequencies and modulation efficiency. We demonstrate acousto-optic modulation of a photonic crystal nanocavity using acoustic waves with frequency up to 20 GHz, reaching the microwave K band. Both the acoustic and photonic devices are fabricated in piezoelectric aluminum nitride thin films. Excitation of acoustic waves is achieved with interdigital transducers with periods as small as 300 nm. Confining both acoustic wave and optical wave within the thickness of the membrane leads to improved acousto-optic modulation efficiency in the new devices than that obtained in the previous surface acoustic wave devices. In a photon-phonon waveguide, we further demonstrate strong Brillouin scattering of light by electromechanically excited acoustic waves. Our system demonstrates a novel scalable optomechanical platform where strong acousto-optic coupling between cavity-confined or guided photons and high frequency traveling phonons can be explored.