AVS 64th International Symposium & Exhibition
    MEMS and NEMS Group Monday Sessions
       Session MN+BI+NS-MoM

Invited Paper MN+BI+NS-MoM3
Nanomechanical Sensors (MSS, AMA) Toward IoT Olfactory Sensor System

Monday, October 30, 2017, 9:00 am, Room 24

Session: Feature Session: Large Scale Integration of Nanosensors
Presenter: Genki Yoshikawa, National Institute for Materials Science, Japan
Correspondent: Click to Email
Owing to their intrinsic versatility, nanomechanical sensors have potential to cover a wide range of olfactory sensing applications in various fields including food, agriculture, medicine, security, and environment. Based on the newly developed platform "Membrane-type Surface stress Sensor (MSS)," we are now trying to realize useful nanomechanical sensor systems which can fulfill the practical requirements, such as portability, low-cost, ease of use, in addition to the basic specifications, e.g. high sensitivity and selectivity. While the MSS provides a practical sensing element, a consumer mobile/IoT sensor system requires further optimization and integration of lots of components including receptor layers, hardware including electronics and sample handling, multidimensional data analysis, and precise calibration for high reproducibility. To establish a de facto standard for odor analysis and sensor systems employing the nanomechanical MSS technology, the "MSS Alliance" was launched jointly with companies and a university. In addition, "Aero-Thermo-Dynamic Mass Analysis (AMA)," which we have recently developed, will provide another approach to characterizing gases by directly measuring molecular weight in ambient condition without a vacuum or ionization. In this talk, the overview of the MSS, AMA, and the related technologies ranging from the optimization scheme of the sensor chip to system level developments will be presented.