AVS 64th International Symposium & Exhibition
    Exhibitor Technology Spotlight Workshops Tuesday Sessions
       Session EW-TuM

Paper EW-TuM8
Development of a Novel Single Cold Cathode Ionization Gauge with Operation from High Vacuum to Atmosphere using Advanced Manufacturing Techniques

Tuesday, October 31, 2017, 10:20 am, Room West Hall

Session: Exhibitor Technology Spotlight
Presenter: Dave Kelly, MKS Instruments, Inc., Pressure and Vacuum Measurement Group
Authors: D. Kelly, MKS Instruments, Inc., Pressure and Vacuum Measurement Group
G. Brucker, MKS Instruments, Inc., Pressure and Vacuum Measurement Group
Correspondent: Click to Email
Cold cathode ionization gauges (CCIGs) have been used for decades to make high vacuum measurements on a variety of production equipment. Traditionally, wide-range CCIGs involve multiple gauge techniques for pressure measurement, making this technology cost-prohibitive and not as robust for many industrial applications. In order to expand the scope of CCIG technology to address cost-sensitive and rugged applications, we have developed an innovative wide-range CCIG. This new CCIG utilizes a one gauge technique – gaseous discharge – which is capable of measuring pressures from high vacuum to atmosphere. Advanced manufacturing techniques were employed that allowed for the testing and selection of low-cost construction materials that are well suited for industrial environments. Moreover, these manufacturing techniques allowed for a design of this new gauge to be easily serviceable during routine preventive maintenance cycles, lowering the overall cost of ownership for a given application. The result of this development yielded a manufacturable low-cost wide-range CCIG capable of accuracy that meets the needs of the industry from 1E-7 Torr to atmosphere.