AVS 64th International Symposium & Exhibition
    Electronic Materials and Photonics Division Tuesday Sessions
       Session EM+NS-TuM

Paper EM+NS-TuM12
Thin-film Metallic Glass: An Effective Diffusion Barrier for Microelectronic Packaging, CIGS Solar Cell and Thermoelectric Modules

Tuesday, October 31, 2017, 11:40 am, Room 14

Session: Nanostructures and Nanometer Films for Electronic and Photonic Devices
Presenter: Jinn Chu, National Taiwan University of Science and Technology, Taiwan, Republic of China
Authors: C.C. Yu, National Taiwan University of Science and Technology, Taiwan, Republic of China
H.J. Wu, National Sun Yat-sen University, Taiwan, Republic of China
J.P. Chu, National Taiwan University of Science and Technology, Taiwan, Republic of China
Correspondent: Click to Email

Thin film metallic glass (TFMG) with its amorphous nature is of great interest owing to its unique properties, including high strength, large elastic limits, excellent corrosion and wear resistance. For many electronics, the atomic inter-diffusion may cause device failure or performance degradation during either fabrication or operation. Thus, the introduction of diffusion barrier layer in the device is a common approach to solve this problem. Crystalline Ni- or Ti-based layers are the most common materials for diffusion barriers. Nevertheless, grain boundaries are generally considered as atomic diffusion path, and thus crystalline metals are not able to block diffusion effectively. TFMG, possessing grain boundary-free structure, is thus thought to efficiently mitigate atomic diffusion.

In this presentation, we report the effects of thin film metallic glass as diffusion barriers on the Sn whisker mitigation in the Cu-Sn couples and the copper indium gallium selenide (CIGS) solar cells on stainless steel (SS) as well as the mid-temperature thermoelectric module. We found that TFMG effectively blocks the Cu/Sn interaction even with the thickness as thin as 25 nm. In addition, with very thin thickness, the introduction of TFMG layer is expected to yield insignificant degrees of compressive stress, which is anticipated to occur when the samples are exposed to thermal cycling. Furthermore, the detrimental iron diffusion from SS into CIGS is found to be effectively hindered by the introduction of a 70-nm-thick TFMG barrier; the cell efficiency is thus from 2.73 for bare sample to 5.25% for the one with TFMG barrier. For application in thermoelectric module, a 200 nm-thick Zr-based TFMG, acting as an effective diffusion barrier layer with low electrical contact resistivity, was deposited on a high-zT Se-doped AgSbTe2 substrate. The reaction couples structured with TFMG/TE were annealed at 673 K for 8–360 hours and analyzed by electron microscopy. No observable intermetallic compounds were formed at the TFMG/TE interface, suggesting the effective inhibition of atomic diffusion.