AVS 62nd International Symposium & Exhibition
    Vacuum Technology Wednesday Sessions

Session VT-WeA
Vacuum Quality and Partial Pressure Analysis

Wednesday, October 21, 2015, 2:20 pm, Room 230B
Moderators: Steve Borichevsky, AMAT VSE, Ted Martinez, SLAC National Accelerator Laboratory


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Click a paper to see the details. Presenters are shown in bold type.

2:20pm VT-WeA1 Invited Paper
Plasma Cleaning of SEMs and Large Vacuum Systems
Ronald Vane, XEI Scientific Inc.
3:00pm VT-WeA3 Invited Paper
Double Deflection and Enhanced Detection - The Use of a Novel Ion Optics for Metastable Rejection and Improved Detection in the Low ppb Range
Jonathan Leslie, MKS Instruments Spectra Products, UK
4:20pm VT-WeA7 Invited Paper
The Deployment of a Commercial RGA to the International Space Station
Matthew S. Kowitt, Stanford Research Systems, D. Hawk, Orbital-ATK, D.J. Rossetti, Conceptual Analytics, M.S. Woronowicz, SGT Inc.
5:00pm VT-WeA9
Temperature-stable Quartz Oscillator Applicable to Pressure Gauges, Gas Sensing, Partial Pressure Measurement, and Plasma Diagnostics
Atsushi Suzuki, AIST, Japan
5:20pm VT-WeA10
An Ultra-high Vacuum Processing System for Constructing Small Format Photodetectors
D.R. Walters, R.J. Wagner, John Noonan, L. Xia, J. Xie, J. Wang, H. Zhao, M. Virgo, Argonne National Laboratory