AVS 62nd International Symposium & Exhibition, Session TF+AS+NS+SA-ThM

AVS 62nd International Symposium & Exhibition
Thin Film	Thursday Sessions

Session TF+AS+NS+SA-ThM
Thin Film: Growth and Characterization, Optical and Synchrotron Characterization I

Thursday, October 22, 2015, 8:00 am, Room 111
Moderator: Divine Kumah, North Carolina State University

Click here to Download program book for this session
in Adobe Acrobat format

Click a paper to see the details. Presenters are shown in bold type.

8:00am	TF+AS+NS+SA-ThM1 Invited Paper Oxynitride Thin Films by Reactive Radiofrequence Magnetron Sputtering - Versatile Materials for Optical Applications Angelique Bousquet, A. Farhaoui, F. Zoubian, C. Taviot-Gueho, J. Cellier, E. Tomasella, Institut de Chimie de Clermont-Ferrand, France
8:40am	TF+AS+NS+SA-ThM3 Invited Paper Surface Science in The Wild: Using Synchrotron Radiation and Lab Grown Thin Films to Understand The Behavior Of SiC in Accident Tolerant Nuclear Fuels Jeffery Terry, Illinois Institute of Technology
9:20am	TF+AS+NS+SA-ThM5 iTF Modulus Solution with xProbe Applications for Ultra-thin Film Systems (<=10nm) Anqi Qiu, A. Romano, Hysitron, Inc.
9:40am	TF+AS+NS+SA-ThM6 Real-time Study of Plasma Enhanced Atomic Layer Epitaxy of InN Films by Synchrotron X-ray Methods Neeraj Nepal, V. Anderson, S.D. Johnson, B. Downey, D. Meyer, U.S. Naval Research Laboratory, A. DeMasi, K.F. Ludwig, Boston University, C. Eddy, U.S. Naval Research Laboratory
11:00am	TF+AS+NS+SA-ThM10 Nucleation and Growth of Few-Layer ALD Films on Various Substrates Studied by Low Energy Ion Scattering (LEIS) Malcolm Hathaway, Harvard University, T. Grehl, P. Bruener, ION-TOF GmbH, Germany, M. Fartmann, Tascon GmbH, Germany, H. Brongersma, ION-TOF GmbH, Germany
11:20am	TF+AS+NS+SA-ThM11 Ni_1-xPt_xSi Film Characterization for sub-32 nm CMOS Fabrication Suraj Patil, R. Rai, S. Beasor, L. Zhou, GLOBALFOUNDRIES, NY, USA
11:40am	TF+AS+NS+SA-ThM12 Growth of β-Tungsten Films Towards a Giant Spin Hall Effect Logic Device Avyaya Narasimham, University at Albany-SUNY, R.J. Matyi, State University of New York, A. Green, University at Albany-SUNY, A.C. Diebold, V. LaBella, State University of New York
12:00pm	TF+AS+NS+SA-ThM13 Aluminum Nitride Grown by Atomic Layer Epitaxy Characterized with Real-Time Grazing Incidence Small Angle X-ray Scattering Virginia Anderson, N. Nepal, S.D. Johnson, US Naval Research Laboratory, A. DeMasi, Boston University, J.K. Hite, US Naval Research Laboratory, K.F. Ludwig, Boston University, C.R. Eddy, Jr, US Naval Research Laboratory