AVS 62nd International Symposium & Exhibition
    Thin Film Monday Sessions

Session TF+2D+MG+NS-MoA
ALD, CVD, MLD, and PLD on Special Materials

Monday, October 19, 2015, 2:20 pm, Room 111
Moderators: Giovanna Scarel, James Madison University, Mark Davidson, University of Florida


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:20pm TF+2D+MG+NS-MoA1
Optical Enhancement of Polyethylene Teraphthalate Films Modified by Organometallic Vapor Infiltration
Halil Akyildiz, North Carolina State University, J.G. Simmons, Redstone Arsenal, H.O. Everitt, Duke University, J.S. Jur, North Carolina State University
2:40pm TF+2D+MG+NS-MoA2 Invited Paper
Organic and Hybrid Organic-Inorganic Thin Film Deposition by Resonant Infrared, Matrix-Assisted Pulsed Laser Evaporation
Adrienne Stiff-Roberts, Duke University
3:40pm TF+2D+MG+NS-MoA5 Invited Paper
Integrating Ultrathin ALD/ALE Films with 1D and 2D Materials to Enable New Device Structures
Virginia Wheeler, N. Nepal, U.S. Naval Research Laboratory, A. Nath, George Mason University, A.D. Koehler, Z.R. Robinson, J.K. Hite, K.M. Daniels, M.A. Mastro, U.S. Naval Research Laboratory, E. Self, P. Pintauro, Vanderbilt University, J.D. Caldwell, R.L. Myers-Ward, D.K. Gaskill, C.R. Eddy Jr., U.S. Naval Research Laboratory
4:20pm TF+2D+MG+NS-MoA7
Development of the Optical Properties of Silicon Rich Oxide Films Growth by CVD Techniques for Possible Photovoltaic Applications
Karim Monfil-Leyva, Benemérita Universidad Autónoma de Puebla, Mexico, A.L. Muñoz-Zurita, Universidad Politécnica Metropolitana de Puebla, Mexico, E. Ojeda-Durán, A. Benítez, J. Carrillo-López, J.A. Luna-López, R.C. Ambrosio-Lázaro, Benemérita Universidad Autónoma de Puebla, Mexico
5:00pm TF+2D+MG+NS-MoA9
Radical-Enhanced Atomic Layer Deposition Enabled Multiferroic Composite Synthesis
C. Pham, Jeffrey Chang, J.P. Chang, University of California at Los Angeles
5:20pm TF+2D+MG+NS-MoA10
Plasma Enhanced Deposition of Nanocrystalline Silicon Thin Films from SiF4 by RF-PECVD and MDECR: Key Aspects of Growth Dynamics
JK. Wang, P. Bulkin, I. Florea, J.L. Maurice, Erik Johnson, LPICM-CNRS, Ecole Polytechnique, France