AVS 62nd International Symposium & Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM8
Inverted Magnetron with Different Cathode Materials

Monday, October 19, 2015, 10:40 am, Room 230B

Session: Vacuum Measurement, Calibration, and Primary Standards
Presenter: Martin Wüest, INFICON Ltd., Liechtenstein
Authors: M.P. Wüest, INFICON Ltd., Liechtenstein
 J. Marki, INFICON Ltd., Liechtenstein
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We have recently developed an inverted magnetron with an exchangeable ionization chamber. The standard version has cathode walls made of stainless steel. We investigated ionization chambers that are made of different cathode materials such as Ni or Ti. For these materials, differences in a long-term self-sputtering test in Ar gas as well as in the anode current vs pressure characteristic were found.