| AVS 62nd International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT-MoA |
| Session: | Extreme High Vacuum |
| Presenter: | Makfir Sefa, National Institute of Standards and Technology (NIST) |
| Authors: | M.S. Sefa, National Institute of Standards and Technology (NIST) J. Fedchak, National Institute of Standards and Technology (NIST) J. Scherschligt, National Institute of Standards and Technology (NIST) |
| Correspondent: | Click to Email |
Stainless steel is the most common metal used in the construction for ultrahigh vacuum (UHV) and extremely high vacuum (XHV) chambers. Hydrogen outgassing from the chamber walls is the predominant residual gas and it limits the lowest attainable pressure level in vacuum systems. There are several methods for reducing hydrogen outgassing rates from stainless steel chamber walls. High temperature (T > 400 °C) heat treatments are typically used to remove hydrogen from the bulk material and reduce outgassing. In this work, a comparison of reduced outgassing rates for high temperature air-baked and vacuum-baked stainless steel chambers is presented. We also will describe a simple apparatus that allowed us to directly compere outgassing rates from two different heat treatment methods.