AVS 62nd International Symposium & Exhibition
    Thin Film Wednesday Sessions
       Session TF+SS-WeM

Paper TF+SS-WeM13
Mechanical Property and Corrosion Resistance Evaluation of CrVN and CrSiN Thin Films Grown by a Hybrid High Power Impulse Magnetron Sputtering and Radio Frequency Sputtering Technique

Wednesday, October 21, 2015, 12:00 pm, Room 114

Session: ALD Surface Reactions and Precursors
Presenter: Jyh-Wei Lee, Ming Chi University of Technology, Taiwan, Taiwan, Republic of China
Authors: J.W. Lee, Ming Chi University of Technology, Taiwan, Taiwan, Republic of China
C.Y. Cheng, Ming Chi University of Technology, Taiwan, Taiwan, Republic of China
P.W. Chang, Ming Chi University of Technology, Taiwan, Taiwan, Republic of China
B.S. Lou, Chang Gung University, Taiwan, Taiwan, Republic of China
Correspondent: Click to Email
High power impulse magnetron sputtering (HIPIMS) is a novel coating technology, which is characterized for its high peak power density to achieve unique thin film properties, such as high hardness, good adhesion and tribological performance. The aim of this work was to systematically study the microstructure, mechanical properties and corrosion resistance of CrVN and CrSiN coatings fabricated by a hybrid high power impulse magnetron sputtering and radio frequency sputtering technique. The experimental results showed that the peak power density increased linearly as the duty cycle decreasing from 5% to 2.5%. As compared with the CrVN coating, the higher hardness and better corrosion resistance were obtained for the CrSiN coatings, which can be attributed to their denser microstructures fabricated using the HIPIMS technology under optimal duty cycle and pulse frequency in this work. Effects of Vanadium and Silicon elements on the microstructure, mechanical and electrochemical properties of CrVN and CrSiN coatings were also discussed.