| AVS 62nd International Symposium & Exhibition | |
| Thin Film | Wednesday Sessions |
| Session TF+AS+BI-WeA |
| Session: | Thin Films for Biological and Biomedical Applications |
| Presenter: | Brian Iverson, Brigham Young University |
| Authors: | J.M. Lund, Brigham Young University D.B. Syme, Brigham Young University R. Vanfleet, Brigham Young University R.C. Davis, Brigham Young University B.D. Jensen, Brigham Young University B.D. Iverson, Brigham Young University |
| Correspondent: | Click to Email |
Sensor usage has increased dramatically in detection applications due to miniaturization of components through micro and nanofabrication. These fabrication methods have also greatly increased production rates, as several sensors can be constructed in parallel. Reduction in feature size of sensors has resulted in an increase in sensor component proximity, making thermal diffusion or cross talk detrimental to proper function. This work investigates the use of carbon nanotube-templated manufacturing (CNT-M) to create thin-film, isolation layers for use in thermal sensors. CNT-M is a process wherein carbon nanotubes are used as a scaffold and coated with insulating materials (e.g. SiO2) to create porous insulating films. Carbon nanotubes are removed in a post-deposition, burn out process rendering a porous matrix of insulating material. Thin-films are characterized using scanning electron microscopy, nanoindentation and the 3-omega method to determine mechanical and thermal properties. Thermal conductivity on the order of air has been observed while still maintaining a rigid structure that is compatible with subsequent MEMS processing.