| AVS 62nd International Symposium & Exhibition | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE+PS+SM-TuM |
| Session: | Atmospheric Pressure Plasmas, CVD and Other Deposition Methods |
| Presenter: | Linying Cui, Stanford University |
| Authors: | L. Cui, Stanford University G. Dubois, IBM Almaden Research Center R.H. Dauskardt, Stanford University |
| Correspondent: | Click to Email |
Atmospheric plasma deposition in ambient air has a huge potential for large-scale coating synthesis at reduced cost for energy, display, and aerospace applications. However, the abundant oxygen in air poses significant oxidation challenge for incorporating specific oxygen sensitive components in the coating. In this work, the oxygen sensitive carbon bridge structure was successfully incorporated into the inorganic silicate network in the oxygen-helium atmospheric plasma in ambient air. The mechanism of incorporating the specific carbon structure in an oxidative species rich environment was elucidated by a kinetics model which takes into account the probability of oxidation, adsorption, and desorption of different precursor species during gas transport and on the substrate surface. The key tuning knobs were identified as the precursor chemistry and the precursor delivery rate. The resulting carbon bridged organo-silicate coatings exhibited significantly improved plasticity, more than doubled adhesion, and up to four times increase of moisture resistance in terms of the driving energy threshold for debonding in humid air, compared to plasma silica coatings and commercial sol-gel polysiloxane coatings. In order to further improve the interfacial bonding of the coating to oxygen sensitive substrate in an oxidative atmospheric plasma environment, other deposition parameters were also investigated in order to fully activate but not over-oxidize the substrate. The resulting carbon bridged, highly adhesive coating showed remarkably enhanced hydrothermal stability, a key requirement for application in exterior coatings and functional membranes. As an example for application, the carbon-bridged coating was deposited between hard scratch-resistant coatings and oxygen-sensitive polymer substrate to enhance the adhesion of hard coatings for airplane window protection.