AVS 62nd International Symposium & Exhibition
    MEMS and NEMS Thursday Sessions
       Session MN-ThM

Paper MN-ThM6
Microfabricated MoS2 and MoS2/Graphene Aerogel based Sensor for NO2 Gas Detection

Thursday, October 22, 2015, 9:40 am, Room 210B

Session: Atomic Layer Nanostructures and 2D NEMS
Presenter: Hu Long, University of California at Berkeley
Authors: H. Long, University of California at Berkeley
M. Worsley, Lawrence Livermore National Laboratory
A. Harley-Trochimczyk, University of California at Berkeley
C. Carraro, University of California at Berkeley
R. Maboudian, University of California at Berkeley
Correspondent: Click to Email
Two dimensional layered materials, such as graphene and transition metal dichalcogenides (TMD) have great potential for gas sensing applications. Ultrasensitive chemical detection using single-layer graphene and single- and few-layer MoS2 has been reported. However, many of these sensors suffer from slow response and recovery. The difficulty of the fabrication process also hinders the broader application of these materials. In this paper, we report on MoS2 and MoS2/graphene aerogels for chemical sensing applications. The aerogels are integrated onto a microfabricated transducer and a ppb level detection limit for NO2 at room temperature is achieved. The performance of the sensors is comparable to the results reported for single or few-layer MoS2 devices but follows much more scalable synthesis and device fabrication processes.