| AVS 62nd International Symposium & Exhibition | |
| Helium Ion Microscopy Focus Topic | Wednesday Sessions |
| Session HI-WeA |
| Session: | GFIS Based Nanostructuring |
| Presenter: | Alex Belianinov, Oak Ridge National Laboratory |
| Authors: | A. Belianinov, Oak Ridge National Laboratory V. Iberi, Oak Ridge National Laboratory A. Tselev, Oak Ridge National Laboratory M,. Susner, Oak Ridge National Laboratory M. McGuire, Oak Ridge National Laboratory D.C. Joy, Oak Ridge National Laboratory S. Jesse, Oak Ridge National Laboratory A.J. Rondinone, Oak Ridge National Laboratory S.V. Kalinin, Oak Ridge National Laboratory O.S. Ovchinnikova, Oak Ridge National Laboratory |
| Correspondent: | Click to Email |
Abstract
Rapid advanced in nanoscience rely on continuous improvements of manipulating matter at near atomic scales. Currently, well understood, robust resist-based lithography, carries the brunt of nanofabrication, however local electron, ion and physical probe methods are improving as well, driven largely in part of their ability to fabricate without multi-step preparation processes that can result in sample contamination from the resists and solvents. Furthermore probe based methods extend beyond nanofabrication to nanomanipulation and imaging, vital ingredients to rapid transition to testing and manufacturing of layered 2D heterostructured devices.
In this work we demonstrate that helium ion interaction in a Helium Ion Microscope (HIM) with the surface of bulk copper indium thiophosphate (CITP) CuMIIIP2X6 (M = Cr, In; X= S, Se) result in the controlled loss of ferrielectric domains, and growth of cylindrical nanostructures with enhanced conductivity, with material volumes scaling to the dosage of the beam. The nanostructures are oxygen rich, sulfur poor, with the copper concentration virtually unchanged as confirmed by Energy Dispersive X-ray (EDX). Scanning Electron Microscopy (SEM) image contrast as well as Scanning Microwave Microscopy (SMM) measurements suggest enhanced conductivity of the formed particle, whereas Atomic Force Microscopy (AFM) based measurements indicate that the resulting structures have lower dissipation and a lower young’s modulus.
Acknowledgements
Research was supported (A. B., V. I., A.T., D. J., S. V. K., S. J., A. J. R. O. S. O) and partially conducted (AFM, HIM) at the Center for Nanophase Materials Sciences, which is sponsored at Oak Ridge National Laboratory by the Scientific User Facilities Division, Office of Basic Energy Sciences, US Department of Energy. This work was also supported (M. S., M. M.) and partially conducted (material growth) by the U.S. Department of Energy, Basic Energy Sciences, Materials Sciences and Engineering Division.