AVS 62nd International Symposium & Exhibition
    Applied Surface Science Monday Sessions
       Session AS-MoM

Paper AS-MoM3
Quantitative Analysis of Advanced Commercial Glasses for Display Technologies

Monday, October 19, 2015, 9:00 am, Room 212D

Session: Quantitative Surface Analysis: Obtaining Quantitative Information in the Face of Material Complexity and Morphology Influences
Presenter: Cody Cushman, Brigham Young University
Authors: C.V. Cushman, Brigham Young University
N.J. Smith, Corning
T. Grehl, ION-TOF GmbH, Germany
P. Bruener, ION-TOF GmbH, Germany
M.R. Linford, Brigham Young University
Correspondent: Click to Email
A series of complex, multicomponent commercial glasses used in advanced display applications was exhaustively analyzed by X-ray photoelectron spectroscopy (XPS), time-of-flight secondary ion mass spectrometry (ToF-SIMS), low energy ion scattering (LEIS), Rutherford backscattering (RBS), atomic force microscopy (AFM), and spectroscopic ellipsometry, where the purpose of this study was to quantify the compositions and properties of these materials. XPS revealed the compositions of the upper ca. 10 nm of the glasses, which differed substantially from each other. Angle resolved XPS suggested some segregation of some elements to the surfaces. These results were confirmed by LEIS, which conclusively identified the elements at the true surfaces of the materials in a quantitative fashion. Like XPS, ToF-SIMS probed the near surface regions of the materials. However, it also identified elements that were beyond the detection limit of XPS. In addition, ToF-SIMS was used with XPS to quantitatively determine the concentration of –OH groups at the surfaces of the glasses via the SiOH+/Si+ ratio. Atomic force microscopy (AFM) showed that the materials were all extremely flat, with roughnesses on the order of 1 nm. Spectroscopic ellipsometry from 200 – 1700 nm was used to determine the optical properties (quantitative dispersion relationships) of the glasses. These techniques provided a comprehensive analysis of these glass samples. In addition, the glasses were subjected to various cleaning procedures (plasma, wet chemical cleans, etc.) and other surface treatments. The same suite of analytical techniques was then used to show conditions that led to changes or no changes in the compositions of the glasses, and these changes were quantified.