| AVS 61st International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | VT-TuM1 A Fast Numerical Method for Determining the Pressure Distribution in Electrostatic Chucks Jack McInerney, Lam Research Corp |
| 8:20am | VT-TuM2 Numerical Simulation of a Jet Disrupter in an Electrospray RF Ion Funnel Eric Tridas, R. Schlaf, University of South Florida, M. Anthony, Elion Systems |
| 8:40am | VT-TuM3 Invited Paper Gas Dynamics Modelling Efforts at CERN Roberto Kersevan, CERN, Switzerland |
| 9:20am | VT-TuM5 Mixture Flow of Rarefied Gases through a Thin Orifice Over the Whole Range of Gas Rarefaction Felix Sharipov, Federal University of Parana, Brazil |
| 9:40am | VT-TuM6 Numerical Modeling of Particle Transport in Rarefied Flow Andreas Mack, Van der Donck, O. Kievit, TNO Delft, the Netherlands |
| 11:00am | VT-TuM10 Invited Paper Improving the Performances of Getter Pumps: Recent Developments in NEG Technology Fabrizio Siviero, G. Bongiorno, L. Caruso, A. Gallitognotta, L. Viale, E. Maccallini, P. Manini, SAES Getters, Italy |
| 11:40am | VT-TuM12 Invited Paper Advanced High Speed Water Vapor Cryopumps: Enabling Today’s Vacuum Processes Kevin Flynn, C. Rebecchi, Brooks Automation, Inc., Polycold |