AVS 61st International Symposium & Exhibition
    Vacuum Technology Tuesday Sessions

Session VT-TuA
Vacuum Quality Analysis, Outgassing, and Control

Tuesday, November 11, 2014, 2:20 pm, Room 303
Moderators: James Fedchak, National Institute of Standards and Technology (NIST), Marcy Stutzman, Thomas Jefferson National Accelerator Facility


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Click a paper to see the details. Presenters are shown in bold type.

2:20pm VT-TuA1 Invited Paper
Our Present Understanding of Outgassing
Manfred Leisch, Graz University of Tech., Austria
3:00pm VT-TuA3
Hydrogen Traps in the Outgassing Model of a Stainless Steel Vacuum Chamber
Robert Berg, National Institute of Standards and Technology (NIST)
3:20pm VT-TuA4
A Mild Steel Ultrahigh Vacuum Chamber Appropriate for Magnetic Shielding
B. Cho, S.J. Ahn, Korea Research Institute of Standards and Science (KRISS), Republic of Korea, C.D. Park, Taekyun Ha, POSTECH, Republic of Korea
4:20pm VT-TuA7 Invited Paper
Ultimate Limits in the Gas Composition Determination Within Small Sealed Volumes by Quadrupole Mass Spectrometry
Vincenc Nemanič, Jozef Stefan Institute, Slovenia
5:00pm VT-TuA9
The Importance of Competitive Langmuir Adsorption Kinetics for Vacuum Cleanliness
Richard Versluis, TNO Technical Sciences, Netherlands
5:20pm VT-TuA10
Diagnostic Tool to Identify Volatile Molecules in Vacuum
Freek Molkenboer, A. Van de Runstraat, J.A. Van der Meer, T. Van Groningen, O. Kievit, TNO Technical Sciences, Netherlands
5:40pm VT-TuA11
Quantitative Gas Analysis of Small Batch Samples by Quadrupole Mass Spectrometer
Lily Wang, Los Alamos National Laboratory
6:00pm VT-TuA12
A Novel Vacuum Mini-Environment Design For Thin Film Sputter Deposition Apparatus
Jun Xie, R.L> Ruck, C. Liu, P. Leahey, T. Bluck, Intevac, Inc.