AVS 61st International Symposium & Exhibition
    Vacuum Technology Monday Sessions

Session VT-MoM
Vacuum Measurement, Calibration, and Primary Standards

Monday, November 10, 2014, 8:20 am, Room 303
Moderators: Steve Borichevsky, Applied Materials,Varian Semiconductor Equipment, Yulin Li, Cornell University


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am VT-MoM1 Invited Paper
Miniature Fiber Optic Pressure Sensors: Technologies and Applications
Miao Yu, University of Maryland, College Park
9:00am VT-MoM3
Quantum Based Vacuum Standard
Jay Hendricks, J.A. Stone, J.E. Ricker, P.F. Egan, G.E. Scace, D.A. Olson, National Institute of Standards and Technology, D.R. Gerty, Sandia National Laboratories, G.F. Strouse, National Institute of Standards and Technology
9:20am VT-MoM4
New PTB Standard to Provide Traceability for Partial Pressure Measurement
Karl Jousten, Physikalisch-Technische Bundesanstalt (PTB), Germany
9:40am VT-MoM5
Study of Long Term Stability of Quadrupole Mass Spectrometers
Janez Setina, Institute of Metals and Technology (IMT), Slovenia, A. Elkatmis, R. Kangi, Ulusal Metroloji Enstitüsü (TUBITAK UME), Turkey, K. Jousten, Physikalisch-Technische Bundesanstalt (PTB), Germany, M. Bergoglio, Istituto Nazionale di Ricerca Metrologica (INRIM), Italy, F. Boineau, Laboratoire National de métrologie et d'Essais (LNE), France, S. Ruiz, Centro Español de Metrología (CEM), Spain, M. Vicar, Czech Metrology Institute (CMI), Czech Republic
10:00am VT-MoM6
The Stability of Spinning Rotor Gauges as Transfer Standards
James Fedchak, National Institute of Standards and Technology (NIST)
10:40am VT-MoM8
Pilot Study for International Comparison of Absolute Pressure Measurement from 3 × 10-9 Pa to 9 × 10-4 Pa
Hajime Yoshida, K. Arai, E. Komatsu, K. Fujii, National Institute of Advanced Industrial Science and Technology (AIST), Japan, K. Jousten, T. Bock, Physikalisch-Technische Bundesanstalt (PTB), Germany
11:00am VT-MoM9
Stability of the Cold Cathode Ionization Gauge
Paul Arnold, G.A. Brucker, Granville-Phillips Vacuum Products
11:20am VT-MoM10
Cold Cathode Ionization Gauge Design Mitigates Well-known Performance Issues
Brandon Kelly, G.A. Brucker, Granville-Phillips Vacuum Products
11:40am VT-MoM11
A Systematic Study of Long-Term Vacuum Gauge Performance
Gerardo Brucker, S. Heinbuch, T.C. Swinney, Granville-Phillips Vacuum Products