AVS 61st International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF+PS-ThM

Paper TF+PS-ThM6
Ozone Pretreatment’s Effect on Infiltration of Carbon Nanotube Forests

Thursday, November 13, 2014, 9:40 am, Room 307

Session: Advanced CVD and Chemical Vapor Infiltration Methods
Presenter: Richard Vanfleet, Brigham Young University
Authors: R.R. Vanfleet, Brigham Young University
L. Barrett, Brigham Young University
J. Rowley, Brigham Young University
K. Hinton, Brigham Young University
R.C. Davis, Brigham Young University
D.D. Allred, Brigham Young University
Correspondent: Click to Email
Thin films deposited on carbon nanotubes (CNTs) appear to be enabling materials for a variety of applications including: capacitive and electrochemical energy storage, chromatography and filtration chemical separations media, chemical sensing, and MEMS. Using CNT forests as a substrate creates new challenges to traditional thin film deposition techniques because of the need to penetrate into the forest and the chemical inertness of the CNT surface. We have explored the effect ozone pretreatment has on film morphology in two different deposition regimes: amorphous silicon deposited by low pressure chemical vapor deposition and nickel deposited by electroplating. TEM and SEM images of the forests after deposition show increased nucleation density on forests that were pretreated with ozone.