| AVS 61st International Symposium & Exhibition | |
| Novel Trends in Synchrotron and FEL-Based Analysis Focus Topic | Tuesday Sessions |
| Session SA-TuM |
| Session: | Characterization of Nanostructured and LD Materials Using Synchrotron-Based Methods |
| Presenter: | Burkhard Beckhoff, Physikalisch-Technische Bundesanstalt (PTB), Germany |
| Authors: | B. Beckhoff, Physikalisch-Technische Bundesanstalt (PTB), Germany M. Gerlach, Physikalisch-Technische Bundesanstalt (PTB), Germany I. Holfelder, Physikalisch-Technische Bundesanstalt (PTB), Germany P. Hoenicke, Physikalisch-Technische Bundesanstalt (PTB), Germany J. Lubeck, Physikalisch-Technische Bundesanstalt (PTB), Germany M. Mueller, Physikalisch-Technische Bundesanstalt (PTB), Germany A. Nutsch, Physikalisch-Technische Bundesanstalt (PTB), Germany B. Pollakowski, Physikalisch-Technische Bundesanstalt (PTB), Germany C. Streeck, Physikalisch-Technische Bundesanstalt (PTB), Germany R. Unterumsberger, Physikalisch-Technische Bundesanstalt (PTB), Germany J. Weser, Physikalisch-Technische Bundesanstalt (PTB), Germany |
| Correspondent: | Click to Email |
The development of efficient nanoscaled materials requires the correlation of the materials’ functionality with their chemical and physical properties. To probe these properties, analytical methods that are both sensitive and selective at the nanoscale are required. The reliability of most analytical methods relies on the availability of reference materials or calibration samples, the spatial elemental composition of which is as similar as possible to the matrix of the specimens of interest. However, there is a drastic lack of reference materials at the nanoscale. We address this challenge by means of a bottom-up X-ray analytical method where all instrumental and experimental parameters are determined with a known contribution to the uncertainty of the analytical results. This approach does not require any reference materials but a complete characterization of the analytical instruments’ characteristics. X-ray spectrometric methods allow for the variation of the analytical sensitivity, selectivity, and information depth needed to effectively reveal the spatial, elemental, and chemical specimen parameters of interest. Examples of interfacial speciation, elemental depth profiling as well as layer composition and thickness characterizations in various nanoscaled materials will be given.
References
[1] R. Unterumsberger, B. Pollakowski, M. Müller, and B. Beckhoff, Anal. Chem. 83 (2011) 8623
[2] R. Unterumsberger, M. Müller, B. Beckhoff, P. Hönicke, B. Pollakowski, S. Bjeoumikhova, Spectrochim. Acta B 78 (2012) 37
[3] F. Reinhardt, J. Osán, S. Török, A.E. Pap, M. Kolbe and B. Beckhoff, J. Anal. At. Spectrom. 27 (2012) 248
[4] A. Delabie, S. Sioncke, J. Rip, S. van Elshocht, G. Pourtois, M. Müller, B. Beckhoff, K. Pierloot,
J. Vac. Sci. Technol. A30 (2012), 01A127
[5] B. Pollakowski, P. Hoffmann, M. Kosinova, O. Baake, V. Trunova, R. Unterumsberger, W. Ensinger, and B. Beckhoff, Anal. Chem. 85 (2013) 193
[6] C. Becker, M. Pagels, C. Zachaus, B. Pollakowski, B. Beckhoff, B. Kanngießer, and B. Rech, J. Appl. Phys. 113 (2013) 044519
[7] C. Streeck, S. Brunken, M. Gerlach, C. Herzog, P. Hönicke, C.A. Kaufmann, J. Lubeck, B. Pollakowski, R. Unterumsberger, A. Weber, B. Beckhoff, B. Kanngießer, H.-W. Schock and R. Mainz, Appl. Phys. Lett. 103 (2013) 113904
[8] J. Lubeck, B. Beckhoff, R. Fliegauf, I. Holfelder, M. Müller, B. Pollakowski, F. Reinhardt and J. Weser, Rev. Sci. Instrum. 84 (2013) 045106
[9] I. Holfelder, B. Beckhoff, R. Fliegauf, P. Hönicke, A. Nutsch, P. Petrik, G. Roeder and J. Weser,J. Anal. At. Spectrom. 28 (2013) 549