AVS 61st International Symposium & Exhibition
    MEMS and NEMS Wednesday Sessions
       Session MN+PS-WeA

Paper MN+PS-WeA9
A Porous Material for Improving Cantilever Q in Air and Liquid for Resonant Mechanical Sensing

Wednesday, November 12, 2014, 5:00 pm, Room 301

Session: Emerging Materials and Fabrication Technologies for MEMS/NEMS
Presenter: Steven Noyce, Brigham Young University
Authors: S. Noyce, Brigham Young University
R.C. Davis, Brigham Young University
R.R. Vanfleet, Brigham Young University
H.G. Craighead, Cornell University
Correspondent: Click to Email
Nanoporous cantilever resonators have potential performance advantages for cantilever based sensing. For porous cantilevers a high surface area leads to a high adsorbed mass which is independent of the cantilever dimensions. Larger cantilever dimensions can lead to higher quality (Q) factors in air and liquid sensing environments. Here we present work on the fabrication of nanoporous carbon/carbon nanotube composite cantilevers. Our results include characterization work on tuning the composite materials properties and cantilever geometries for high Q in fluid.