AVS 61st International Symposium & Exhibition
    MEMS and NEMS Wednesday Sessions
       Session MN+PS-WeA

Paper MN+PS-WeA4
High Aspect Ratio Magnetic MEMS Fabricated using Carbon Nanotube Templated Microfabrication

Wednesday, November 12, 2014, 3:20 pm, Room 301

Session: Emerging Materials and Fabrication Technologies for MEMS/NEMS
Presenter: Robert Davis, Brigham Young University
Authors: R.C. Davis, Brigham Young University
L. Barrett, Brigham Young University
D. Barton, Brigham Young University
R.R. Vanfleet, Brigham Young University
D.D. Allred, Brigham Young University
Correspondent: Click to Email
We have fabricated nickel microstructures with aspect ratios greater than 20-1, and feature sizes as small as 5 um. The process involves growing a forest of carbon nanotubes in the desired pattern, and coating the tubes with an additional a layer of carbon by CVD. Then the remaining space in the forest, approximately 90%, is filled with nickel by pulsed electroplating. Because the resulting composite has a magnetic response, it is ideal for MEMS magnetic sensors and actuators. To demonstrate this, we constructed a simple MEMS scale sensor with a frame, two flexures and a proof mass. Optical measurement of the proof mass’s displacement as a function of applied magnetic field will be shown.