AVS 61st International Symposium & Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeM

Paper EW-WeM8
Product Advancements to Reduce Semiconductor Manufacturing Contamination

Wednesday, November 12, 2014, 10:20 am, Room Hall ABC

Session: Exhibitor Technology Spotlight Session
Presenter: Mark Heller, Dupont™ Kalrez® and Vespel
Authors: J. Legare, Dupont™ Kalrez® and Vespel
M. Heller, Dupont™ Kalrez® and Vespel
Correspondent: Click to Email
Sealing materials can degrade in harsh semiconductor manufacturing processes. Advancements in elastomeric sealing materials and their components help reduce the risk of contamination from sealing materials. This presentation will highlight the latest DuPont Kalrez® sealing products and their test results.