AVS 61st International Symposium & Exhibition
    Exhibitor Technology Spotlight Thursday Sessions
       Session EW-ThM

Paper EW-ThM8
An Entirely New Generation of Cold Cathode Gauges

Thursday, November 13, 2014, 10:20 am, Room Hall ABC

Session: Exhibitor Technology Spotlight Session
Presenter: Martin Wüest, INFICON Ltd., Liechtenstein
Correspondent: Click to Email

The cold cathode gauge is a robust vacuum gauge used in many applications. INFICON has introduced an entirely new generation of the inverted magnetrons shedding the issues that plagued performance of the past and now allow its use even in domains that have traditionally been occupied by hot ionization gauges. An innovative and patented magnet design produces the first sensor conforming to Semi S2 specifications regarding ultra-low external magnetic stray field. Together with its small dimensions and low magnetic stray field, it can even be used within analytical devices without impact on surrounding instrumentation. First customer data received demonstrates that the gauge lasts approximately four times longer in a process environment than its predecessor. A unique interchangeable dual chamber facilitates maintenance. It takes only moments to exchange the sensor and return it to normal functional performance. Additional significant features will be discussed, as well.