AVS 61st International Symposium & Exhibition
    Electronic Materials and Processing Thursday Sessions
       Session EM2-ThM

Invited Paper EM2-ThM10
High-K Development for DRAM, NAND, and ReRAM Applications

Thursday, November 13, 2014, 11:00 am, Room 314

Session: High-K Dielectrics for ReRAM and RAM
Presenter: Nirmal Ramaswamy, Micron Technology
Correspondent: Click to Email

DRAM, NAND and ReRAM utilize high-K oxides to enable high performance devices . High-K oxides are deployed as capacitor dielectrics in DRAM, blocking dielectrics in NAND and solid state electrolytes to enable ion motion in ReRAM. The material and electrical properties required to enable these different technologies are widely different. Several critical parameters such as dielectric constant, band offset, trap density, modulus, crystallinity and texture have to be simultaneously optimized for each technology. This talk highlights the performance requirements of advanced memory devices and the high-K materials engineering required to enable these devices.