AVS 61st International Symposium & Exhibition
    Electronic Materials and Processing Tuesday Sessions
       Session EM-TuP

Paper EM-TuP16
AFM Study on the Structural Properties of Gold Thin Films by RF Magnetron Sputtering

Tuesday, November 11, 2014, 6:30 pm, Room Hall D

Session: Electronic Materials and Processing Poster Session
Presenter: Moniruzzaman Syed, Lemoyne-Owen College
Authors: M. Syed, Lemoyne-Owen College
C. Glaser, Lock Haven University
M. Schell, Lock Haven University
I. Senevirathne, Lock Haven University
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Gold (Au) thin films offer a wide range of applications in many fields such as memory storage, energy harvesting and storage, nanosensors, optics, biosensing devices and catalysis. Au film is paying more attention in many critical applications as it is highly conductive and is not easily oxidized. Therefore, it is necessary to understand the growth mechanism of film on various substrates. The structural properties of gold thin films are also playing very important role on the film quality which may affect optical properties as well as the sensing capabilities of the devices. In this study, Gold (Au) thin films were deposited on both glass and Si (100) substrates at room temperature (RT) with Ar gas atmosphere as a function of deposition time. The structural properties and surface morphology of Au thin film has been studied using Atomic Force Microscope (AFM). The deposition rate was found to be increased with increasing time of those films deposited on glass substrate. The effect of annealing temperature on the structural properties of Au film deposited on various substrates will also be discussed.