AVS 61st International Symposium & Exhibition
    Electronic Materials and Processing Monday Sessions
       Session EM-MoA

Invited Paper EM-MoA1
Synthesis of Nanoparticles Via Gas-Aggregated Sputtering

Monday, November 10, 2014, 2:00 pm, Room 314

Session: Nanoparticles for Electronic Materials
Presenter: Cathal Cassidy, Okinawa Institute of Science and Technology, Japan
Correspondent: Click to Email

Synthesis of nanoparticles via gas-aggregated sputtering allows direct integration with electronic devices and their manufacturing processes. In this talk, I will discuss the fundamentals of gas-aggregated sputtering, and the diverse capabilities it offers for synthesis of novel nanoparticle materials. Analytical models will be introduced, as well as molecular dynamics modeling insights into growth and substrate landing of nanoparticles. Example results, with a focus on transmission electron microscopy studies, will be presented. Finally, the strengths and weaknesses of sputtered nanoparticles for various device applications, such as sensor layers, data storage and backend interconnects, will be discussed.