AVS 61st International Symposium & Exhibition
    Spectroscopic Ellipsometry Focus Topic Thursday Sessions
       Session EL+AS+EM+MC+SS-ThA

Paper EL+AS+EM+MC+SS-ThA7
Characterization of SiO2 Nanoparticle Layers on a Glass Substrate by Spectroscopic Imaging Ellipsometry and AFM

Thursday, November 13, 2014, 4:20 pm, Room 304

Session: Optical Characterization of Nanostructures and Metamaterials
Presenter: Peter H. Thiesen, Accurion GmbH, Germany
Authors: P.H. Thiesen, Accurion GmbH, Germany
G. Hearn, Accurion Inc.
C. Röling, Accurion GmbH, Germany
Correspondent: Click to Email

The well-directed organization of nanoparticles is of increasing technical and scientific interest. One approach is the organization of nanoparticles at the air/water interface for applications, like producing 2D colloidal crystals or nanowires. For example, Gil et al. (2007) monitored the formation of 2D colloidal crystals by Langmuir–Blodgett technique. They used Brewster angle microscopy to observe the film quality. Zang et al. (2009) have also studied silica nanoparticle layers at the air/water interface by multiple angle of incidence ellipsometry. For data interpretation, a two-layer model was introduced. With this model, the radius of interfacial aggregates and the contact angle of the nanoparticle surface at the air/water interface were obtained.

In this paper d ifferent line shaped pattern of SiO2 nanoparticles were characterized by spectroscopic imaging ellipsometry in the wavelength range between 360 and 1000 nm and by AFM. The samples were provided by the research group of Professor Y. Mori, Doshisha University, Japan.

The work shows the unique capability of imaging ellipsometry in characterizing patterned surfaces. We started with a pre inspection of the surface by imaging ellipsometric contrast microscopy. Tiny regions of interest (ROIs) were placed on interesting areas like on different steps of the stripes and Delta and Psi spectra were recorded. The next step in characterization was the mapping of Delta and Psi with pixel resolution of the detector. The same samples were also characterized with an AFM. The results optical modelling are in good agreement with the results of the scanning method.

A. Gil, M. Vaupel, F. Guitiana, D. Möbius (2007) Journal of Materials Chemistry 17: 2434–2439.

D. Zang, A. Stocco, D. Langevin, B. Weib, B.P. Brinks (2009) Phys. Chem. Chem. Phys.11: 9522–9529.