AVS 61st International Symposium & Exhibition
    Applied Surface Science Tuesday Sessions
       Session AS+MC+SS-TuA

Paper AS+MC+SS-TuA8
Thickness and Composition Determination of Thin Film Sn-Oxides Growth at Room Temperature using XPS Spectra

Tuesday, November 11, 2014, 4:40 pm, Room 316

Session: Analysis of Modified Surfaces
Presenter: Jorge Huerta-Ruelas, Instituto Politecnico Nacional, Mexico
Authors: M. Bravo-Sanchez, CINVESTAV-Queretaro, Mexico
J.A. Huerta-Ruelas, Instituto Politecnico Nacional, Mexico
A. Herrera-Gomez, CINVESTAV-Queretaro, Mexico
Correspondent: Click to Email

The knowledge of the tin oxidation process is important for the development corrosion-free coatings and the engineering of alloys and compounds with specific functional properties. Tin, pure and well controlled oxidized samples were characterized by X-ray photoelectron spectroscopy (XPS). All samples were prepared on Si (100) substrates with RCA treatment before Sn deposition. The thickness of the Sn layer was approximately 100 Å as measured by a thickness monitor. The pure Sn sample was measured without ambient exposure. The oxidized samples were obtained by exposing pure Sn samples to pure oxygen at a pressure of 1x10-4 Torr. Three different exposure times were used: 10, 180 and 1200 seconds. To fit XPS spectra, traditional and novel method (using a double-Lorentzian) were employed to calculate thickness and composition of the oxide layer. High resolution transmission electron microscopy measurements were performed to validate calculations. Structural parameters obtained with different XPS data fitting approaches were compared, showing a clear advantage of the double-Lorentzian method in the understanding of the initial stages of tin oxidation.