| AVS 60th International Symposium and Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PS1-TuA1 Real Time Feedback Control of Photoresist ashing in an Electron Cyclotron Resonance Plasma Chamber B.J. Keville, C. Gaman, Y. Zhang, A.M. Holohan, S. Daniels, M.M. Turner, Dublin City University, Ireland |
| 2:20pm | PS1-TuA2 Diagnostics of Inductively-Coupled Plasmas in Hydrogen Bromide : Bromine Atom and Electron Densities J.-P. Booth, N. Sirse, P. Chabert, M. Foucher, LPP-CNRS, Ecole Polytechnique, France |
| 2:40pm | PS1-TuA3 Invited Paper Ion Energy Distribution Measurements at the Substrate Location in Continuous-wave and Pulse Modulated Plasmas D. Gahan, P. Scullin, D. O'Sullivan, M.B. Hopkins, Impedans Ltd., Ireland |
| 4:00pm | PS1-TuA7 Invited Paper Time-resolved Optical and Electrical Diagnostics of Pulsed Plasmas Etching Processes G. Cunge, M. Brihoum, M. Darnon, E. Despiau-Pujo, A. Davydova, M. Haass, R. Blanc, Cnrs/ujf/ Cea - Ltm, France, N.St.J. Braithwaite, The Open University, UK, D. Gahan, Impedans Ltd, Ireland, S. Banna, AMAT, O. Joubert, N. Sadeghi, Cnrs/ujf/ Cea - Ltm, France |
| 4:40pm | PS1-TuA9 Optical Emission and Langmuir Probe Diagnostics of CH3F-O2 Inductively Coupled Plasmas E. Karakas, V.M. Donnelly, D.J. Economou, University of Houston |
| 5:00pm | PS1-TuA10 Non-contact Measurements of Substrate-Temperature by Frequency-Domain Low-Coherence Interferometry T. Tsutsumi, Nagoya University, Japan, T. Ohta, Meijo University, Japan, K. Ishikawa, K. Takeda, H. Kondo, M. Sekine, M. Hori, Nagoya University, Japan, M. Ito, Meijo University, Japan |
| 5:20pm | PS1-TuA11 Detection of Vacuum Ultraviolet in Argon-containing Inductively Coupled Plasmas S.B. Radovanov, Varian Semiconductor Equipment, Silicon Systems Group, Applied Materials Inc., H.M. Persing, Applied Materials Inc. Varian Semiconductor Equipment, Silicon Systems Group, Applied Materials Inc., J.B. Boffard, C.L. Culver, S. Wang, C.C. Lin, A.E. Wendt, University of Wisconsin-Madison |
| 5:40pm | PS1-TuA12 Time-resolved In Situ Quantum Cascade Laser Diagnostics Applied to Transient Molecular Plasmas S. Welzel, Eindhoven University of Technology, Netherlands, F. Brehmer, Eindhoven University of Technology, Netherlands; AFS GmbH, Germany, M.C.M. van de Sanden, Eindhoven University of Technology; DIFFER, Netherlands, R. Engeln, Eindhoven University of Technology, Netherlands |