AVS 60th International Symposium and Exhibition
    Plasma Science and Technology Wednesday Sessions

Session PS-WeA
PSTD at AVS60: Looking Back and Moving Forward

Wednesday, October 30, 2013, 2:00 pm, Room 104 C
Moderator: C.A. Wolden, Colorado School of Mines


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm PS-WeA1 Invited Paper
The Origins of the AVS Plasma Science and Technology Division
H.F. Dylla, American Institute of Physics
2:40pm PS-WeA3 Invited Paper
The Emergence of Plasma Processing
M.A. Lieberman, University of California, Berkeley
4:00pm PS-WeA7 Invited Paper
The Virtual World of Modeling Plasma Processing
M.J. Kushner, University of Michigan
4:40pm PS-WeA9 Invited Paper
Innovations in Diagnsotics for Non-Thermal Plasma
N.St.J. Braithwaite, The Open University, UK
5:20pm PS-WeA11 Invited Paper
Plasma Surface Interactions and How They Limit Semiconductor Plasma Processing
R.A. Gottscho, K.J. Kanarik, S. Sriraman, Lam Research Corp