AVS 60th International Symposium and Exhibition
    MEMS and NEMS Tuesday Sessions

Session MN+NS-TuM
Micro and Nano Systems based on Carbon and Piezoelectric Materials

Tuesday, October 29, 2013, 8:00 am, Room 102 A
Moderator: P. X.-L. Feng, Case Western Reserve University

  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am MN+NS-TuM1 Invited Paper
Science and Technology of Integrated Piezoelectric and Ultrananocrystalline Diamond Films for a New Generation of High Performance MEMS and NEMS Devices
O. Auciello, University of Texas at Dallas
8:40am MN+NS-TuM3 Invited Paper
Utilizing Piezoelectric MEMS Across Length Scales
S. Trolier-McKinstry, Penn State University
9:40am MN+NS-TuM6
Two-Dimensional (2D) MoS2 Semiconducting Crystal Nanomechanical Resonators with Frequency Scaling
J. Lee, Z. Wang, K. He, J. Shan, P. X.-L. Feng, Case Western Reserve University