AVS 60th International Symposium and Exhibition
    Electronic Materials and Processing Monday Sessions

Session EM+TF-MoM
High-k Gate Oxides for High Mobility Semiconductors I

Monday, October 28, 2013, 8:20 am, Room 101 B
Moderator: C.L. Hinkle, University of Texas at Dallas


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am EM+TF-MoM1
Ultrathin Titanyl Phthalocyanine Active Layer on Graphene for Atomic Layer Deposition
A.C. Kummel, H.H. Park, University of California, San Diego, S.W. Park, University of California at San Diego
8:40am EM+TF-MoM2
Correlation between Current-Voltage Measurements and the Barrier Height Determined by XPS in Ge p-MOS Capacitors
S. Fadida, F. Palumbo, Technion Israel Institute of Technology, Israel, L. Nyns, H.C. Lin, S. Van Elshocht, M. Caymax, IMEC, Belgium, M. Eizenberg, Technion Israel Institute of Technology, Israel
9:00am EM+TF-MoM3 Invited Paper
Gate Dielectrics on Graphene
J. Kim, The University of Texas at Dallas
9:40am EM+TF-MoM5
Impact of N2 and Forming Gas Plasma Exposure on the Growth and Interfacial Characteristics of Al2O3 on Al0.25Ga0.75N
X. Qin, B. Brennan, H. Dong, A. Azcatl, R.M. Wallace, University of Texas at Dallas
10:00am EM+TF-MoM6
Monitoring the HfO2-InAs Interface during the ALD Process using Ambient Pressure X-ray Photoemission Spectroscopy
R. Timm, S. Yngman, A. Head, J. Knutsson, M. Hjort, J. Knudsen, J. Schnadt, L.-E. Wernersson, A. Mikkelsen, Lund University, Sweden
10:40am EM+TF-MoM8 Invited Paper
Challenges and Progress in Complementary Tunnel FETs
M. Wistey, G. Zhou, Y. Lu, R. Li, Q. Zhang, W.S. Hwang, Q. Liu, T. Vasen, C. Chen, M. Qi, H. Zhu, J.-M. Kuo, S. Chae, Y. Lu, H. Zhu, J.-M. Kuo, T. Kosel, S. Koswatta, P.J. Fay, A. Seabaugh, H. Xing, University of Notre Dame
11:20am EM+TF-MoM10
In Situ Infrared Study on the Interfacial Layer Formation during the Atomic Layer Deposition of Aluminum Silicate on Chemically-treated InP(100)
W. Cabrera, K. Bernal-Ramos, A. Vega, The University of Texas at Dallas, I.M. Povey, Tyndall National Institute, Ireland, H. Dong, B. Brennan, R.M. Wallace, Y.J. Chabal, The University of Texas at Dallas
11:40am EM+TF-MoM11
Density Function Theory Simulations of a-Al2O3/GaN(0001) Interfaces Resulting from Ex Situ and In Situ Surface Preparation
A.C. Kummel, E. Chagarov, S. Gu, P. Asbeck, University of California San Diego, S. Madisetti, S. Oktyabrsky, University at Albany-SUNY, T. Kaufman-Osborn, A.J. Kerr, University of California San Diego