| AVS 60th International Symposium and Exhibition | |
| Thin Film | Friday Sessions |
| Session TF+EM+NS+SS-FrM |
| Session: | Thin Film: Growth and Characterization III |
| Presenter: | S. Kanyal, Brigham Young University |
| Authors: | S. Kanyal, Brigham Young University A. Diwan, Brigham Young University D.S. Jensen, Diamond Analytics A. Dadson, Diamond Analytics M. Vail, Diamond Analytics M.R. Linford, Brigham Young University |
| Correspondent: | Click to Email |
We have recently described the microfabrication of planar separation devices (thin layer chromatography plates).1-3 These devices are created through the following steps, where silicon wafers are used as the substrates: deposition of 35 nm of alumina, deposition of ca. 6 nm of Fe, annealing of the Fe under a reducing environment to make Fe nanoparticles, carbon nanotube (CNT) growth, conformal coating of the CNTs with SiO2, oxidative removal of the CNTs, and hydration of the SiO2 surface. To understand our materials, we have exhaustively characterized them by a suite of characterization techniques. Spectroscopic ellipsometry has taught us about the optical properties of the materials, e.g., thicker Fe films are found to be more metallic than thinner Fe films and alumina films can be well parameterized by a Cauchy dispersion model. ToF-SIMS shows that as surface hydration became more effective, the SiOH+/Si+ ratio increases. Indeed, the SIMS results are correlated to the more commonly used FTIR analyses, but they appear to have greater predictive power for highly hydrated surfaces. ToF-SIMS also suggests an interesting even/odd effect in ion yields from the CNTs. Rutherford backscattering suggests an interesting potential channeling phenomenon in the CNT forests. XPS shows that the thinner Fe films are completely oxidized and that the CNT surfaces are entirely carbon with only slight oxidation/contamination one year after their fabrication. TEM confirms the deposition of inorganic materials around individual CNTs. AFM shows that the size of the Fe nanoparticles increases with increasing Fe thickness.
1. Jensen, D. S.; Kanyal, S. S.; Gupta, V.; Vail, M. A.; Dadson, A. E.; Engelhard, M.; Vanfleet, R.; Davis, R. C.; Linford, M. R., , 195-203.
2. Kanyal, S. S.; Jensen, D. S.; Miles, A. J.; Dadson, A. E.; Vail, M. A.; Olsen, R. E.; Fabien, S.; Nichols, J.; Vanfleet, R.; Davis, R.; Linford, M. R., (3), 031203.
3. Song, J.; Jensen, D. S.; Hutchison, D. N.; Turner, B.; Wood, T.; Dadson, A.; Vail, M. A.; Linford, M. R.; Vanfleet, R. R.; Davis, R. C., (6), 1132-1139.