| AVS 60th International Symposium and Exhibition | |
| Transparent Conductors and Printable Electronics Focus Topic | Tuesday Sessions |
| Session TC-TuP |
| Session: | Transparent Conductors and Printable Electronics Poster Session |
| Presenter: | K. Nagamoto, LINTEC Corporation, Japan |
| Authors: | K. Nagamoto, LINTEC Corporation, Japan K. Kondo, LINTEC Corporation, Japan K. Ishii, Utsunomiya University, Japan |
| Correspondent: | Click to Email |
Transparent conductive oxides (TCO) on polymer substrates are prospected as a key material for next-generation devices such as flexible displays and photovoltaics. The advantages of polymer substrates include light-weight, low cost, a multiplicity of materials with tailored properties, shock absorption and highly flexibility. However, polymer substrates also have disadvantages such as low heat resistance and large thermal expansion coefficient compared with glass substrates. A main challenge for an efficient TCO on polymer substrate is not only to choose conductive oxide materials having capability of growing at low substrate temperature, but also to develop a deposition processes in order to obtain good electrical characteristics. Thus, in this study structural, electrical and optical properties of highly transparent conductive polycrystalline Ga-doped ZnO (GZO) and In, Ga-doped ZnO (IGZO) films deposited on plastic substrates at below 100 °C by magnetron sputtering were investigated. The dependences of crystal structure, electrical and optical properties of the GZO and IGZO films on plastic substrates have been systematically studied. The surfaces of plastic substrates and optically properties were controlled by coating buffer layers (CBLs).
The aim of this study is to investigate the effect of surface roughness of plastic substrates on characteristics of GZO and IGZO films of less than 150 nm thickness, such as structural and electrical characteristics. Then optically properties of GZO and IGZO films, for example transmittance, reflectance, yellow index, haze, a* and b* value, were depend on GZO and IGZO films thickness and CBLs. The GZO and IGZO films in the thicknesses range from 20 to 120 nm were prepared by magnetron sputtering. The resistivity and average transmittance in the visible wavelength region of GZO films of 120 nm thickness on plastic substrates were 1.0 x 10-3 ohm·cm and more than 85 %, respectively.