| AVS 60th International Symposium and Exhibition | |
| MEMS and NEMS | Monday Sessions |
| Session MN+AS+SS-MoM |
| Session: | Fabrication and Multi-scale Interactions of Materials, Surfaces, and Interfaces at the Micro- and Nano-scale |
| Presenter: | L. Barrett, Brigham Young University |
| Authors: | L. Barrett, Brigham Young University D. Barton, Brigham Young University R.C. Davis, Brigham Young University R.R. Vanfleet, Brigham Young University D.D. Allred, Brigham Young University |
| Correspondent: | Click to Email |
High aspect ratio metallic microstructures have a variety of potential applications in sensing and actuation. However, fabrication remains a challenge. We have fabricated Ni microstructures with aspect ratios greater than 20:1 by electroplating a pattern of carbon coated carbon nanotubes (CNTs). Patterned CNT forests were grown from ethylene by an atmospheric chemical vapor deposition (CVD) at 750ºC followed by a second ethylene CVD step at 900ºC. The second step coats the CNTs and the substrate with a 10nm carbon layer. This coating locks the CNTs together at the points where they touch each other and adheres the CNT forest to the substrate which prevents the forest from deforming or delaminating in the electroplating bath. This carbon coated CNT structure is approximately 95% void space. The void space was then filled with Ni by pulsed electroplating the carbon coated CNTs in a low stress nickel sulfamate bath with a 3ms on time and a 15ms off time. The off time allows the Ni ions to diffuse into the structure to improve uniformity. We will present on the development of the fabrication process and characterization of the resulting C-Ni composite 3D microstructure.