Unique properties of new materials are exploited in emerging applications including electronics, optical, biological nanoelectronics, and advanced electromechanical systems. Despite the extraordinary efforts in developing these materials, an efficient and compact single chamber vacuum deposition system capable of addressing needs of all thin films and nanomaterials is not available at a commercial level. For this reason, Blue Wave Semiconductors has developed an integrated physical and chemical vapor deposition tool for synthesizing all carbon based thin films and nanostructures including diamond, nanodiamond, CNTs and graphene, metals, oxides, nitride, carbide thin films and their nanostructures. We have successfully designed and developed chemical and physical vapor deposition processes in a single processing chamber to efficiently deposit a variety of advanced thin film materials and nanostructures. We will present our systematic study on identification of various processing parameters on growth of nanostructures of carbon materials. Some examples of nanodiamond and graphene films synthesized using exploratory tool developed for carbon materials for electronics will be highlighted. Blue Wave Semiconductors, Inc. is a global supplier of advanced thin film and nanomaterial deposition systems and tools. The company manufactures reliable physical vapor deposition, chemical vapor deposition and integrated custom deposition systems involving laser, DC, rf plasma, sputtering, hot filament, and electron beam. Its thin film deposition systems combine multidisciplinary designs and processes involving filament generated atomic hydrogen, laser induced plasma, with chemical processes. Blue Wave’s deposition tools are excellent for synthesis of novel coating materials of composite nanostructural carbides, oxides, nitrides, and carbon materials such as diamond, graphene, and CNTs. Its deposition equipment products are designed primarily for universities, research centers and leading national laboratories around the world. It also provides prototype runs of a variety of thin film coatings and device fabrication to its electronic thin film R&D customers.