AVS 59th Annual International Symposium and Exhibition
    Electronic Materials and Processing Monday Sessions

Session EM+TF+OX+GR-MoM
High-k Dielectrics for MOSFETs I

Monday, October 29, 2012, 8:20 am, Room 009
Moderator: A.C. Kummel, University of California San Diego


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am EM+TF+OX+GR-MoM1 Invited Paper
Surface Preparation and Dielectric Growth for Graphene-based Devices
R.M. Wallace, University of Texas at Dallas
9:00am EM+TF+OX+GR-MoM3 Invited Paper
Antimonide-Based P-Channel MOSFET: Progress and Challenges
S. Oktyabrsky, A. Greene, S. Madisetti, P. Nagaiah, M. Yakimov, R. Moore, S. Novak, H. Bakhru, V. Tokranov, University at Albany-SUNY
9:40am EM+TF+OX+GR-MoM5
Interface Study of the Atomic Layer Deposited Al2O3 on Al0.25Ga0.75N
X. Qin, B. Brennan, H. Dong, R.M. Wallace, The University of Texas at Dallas
10:00am EM+TF+OX+GR-MoM6
Ideal Monolayer Nitridation of Semiconductors using a Nitrogen Radical Generator
A.T. Lucero, J. Kim, University of Texas at Dallas
11:00am EM+TF+OX+GR-MoM9
Characterization of ALD Laminated Gate Dielectrics on GaN MOSCAPs
D. Wei, T. Hossain, Kansas State University, N. Nepal, N.Y. Garces, Naval Research Laboratory, H.M. Meyer III, Oak Ridge National Laboratory, C.R. Eddy, Jr., Naval Research Laboratory, J.H. Edgar, Kansas State University
11:20am EM+TF+OX+GR-MoM10 Invited Paper
Passivation of Interfacial Defects in GaAs and Other III-Vs
J. Robertson, Cambridge University, UK