| AVS 58th Annual International Symposium and Exhibition | |
| Plasma Science and Technology Division | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS+TF-ThM1 High Quality SiNx by Microwave RLSA Plasma Enhanced Atomic Layer Deposition Takayuki Karakawa, M. Oka, N. Fukiage, H. Ueda, T. Nozawa, Tokyo Electron Technology Development Institute, INC., Japan |
| 8:20am | PS+TF-ThM2 Composition, Morphology and Optical Dispersion of Plasma Polymerized Titanium Oxide Derived Using PECVD Lirong Sun, General Dynamics Information Technology, A. Reed, Air Force Resarch Laboratory, H. Jiang, General Dynamics Information Technology, J.T. Grant, University of Dayton Research Institute, R. Jakubiak, Air Force Resarch Laboratory |
| 8:40am | PS+TF-ThM3 Invited Paper Plasma Deposition of Carbide-Based Composite Membranes for Hydrogen Purification Colin Wolden, Colorado School of Mines |
| 9:20am | PS+TF-ThM5 Quantum Dot Sensitized Solar Cells using Nanoparticles of Si Compounds Fabricated by Multihollow Discharge Plasma CVD Masaharu Shiratani, G. Uchida, M. Sato, Y. Wang, K. Koga, N. Itagaki, Kyushu University, Japan |
| 9:40am | PS+TF-ThM6 Structure of Organosilicon Polymeric Films Obtained by Expanding Thermal Plasma Chemical Vapor Deposition P.H. Tchoua Ngamou, M.C.M. van de Sanden, M. Creatore, Eindhoven University of Technology, the Netherlands |
| 10:40am | PS+TF-ThM9 Impact of VUV Photons and Ions on Metal Oxide Films Prepared by Plasma-Assisted ALD with Substrate Biasing Harald Profijt, M.C.M. van de Sanden, W.M.M. Kessels, Eindhoven University of Technology, Netherlands |
| 11:20am | PS+TF-ThM11 Plasma Enhanced Atomic Layer Deposition and Plasma Etching of Gadolinium Oxide High-k Gate Dielectrics Steven Vitale, MIT Lincoln Laboratory, C. Hodson, Oxford Instruments Plasma Technology, UK |
| 11:40am | PS+TF-ThM12 Nano- & Micro-Hybrid Materials by a Novel Plasma Deposition Method M. Gulas, A. Felten, Research Center in Physics of Matter and Radiation (PMR) Facultés Universitaires Notre-Dame de la Paix (FUNDP), Belgium, A. Mansour, J. Guillot, Centre de Recherche Public - Gabriel Lippmann, Luxembourg, N. Claessens, Université Libre de Bruxelles, Belgium, F. Reniers, Universite Libre de Bruxelles, Belgium, A.L.D. Kilcoyne, Lawrence Berkeley National Laboratory, Jean-Jacques Pireaux, Research Center in Physics of Matter and Radiation (PMR) Facultés Universitaires Notre-Dame de la Paix (FUNDP), Belgium |