AVS 58th Annual International Symposium and Exhibition
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuP

Paper VT-TuP4
A System for Vacuum Gauge Calibration in the Pressure Range of 10-5 to 105 Pa

Tuesday, November 1, 2011, 6:00 pm, Room East Exhibit Hall

Session: Vacuum Technology Poster Session & Student Poster Competition
Presenter: YuWei Lin, National Applied Research Laboratories, Taiwan, Republic of China
Authors: Y.W. Lin, National Applied Research Laboratories, Taiwan, Republic of China
C.P. Lin, National Applied Research Laboratories, Taiwan, Republic of China
C.N. Hsiao, National Applied Research Laboratories, Taiwan, Republic of China
Correspondent: Click to Email
A vacuum gauges calibration system for wide-range pressure was developed, and the measurement uncertainty associated with the system. The design of the system took into consideration of influencing factors that include uniformity of gas distribution and the geometric location of the gauge to be calibrated. The system operates following the procedure stipulated in the comparison vacuum gauge calibration method. The calibration may range from 105 to 10–5 Pa. The system makes use of capacitor vacuum gauge, SRG and hot cathode thermion vacuum gauge to estimate the degree of uncertainty associated with the system. The data collected from the gauge calibration tests indicated that if the background pressure of the system had reached 10–7 Pa, the uncertainty associated with the system were as follows: less than 4 % in the pressure range of 10-5 to 10–2 Pa, less than 2 % in the pressure range of 10-2 to 105 Pa. The present research has demonstrated the high stability of the vacuum calibration system, and its capabilities of conducting calibration for vacuum gauge with great efficacy.