AVS 58th Annual International Symposium and Exhibition
    Vacuum Technology Division Monday Sessions
       Session VT-MoM

Paper VT-MoM5
Review of Thermal Conductivity Vacuum Gauges

Monday, October 31, 2011, 9:40 am, Room 111

Session: Vacuum Measurement, Calibration & Primary Standards, Gas Flow and Permeation
Presenter: Martin Wüest, INFICON Ltd, Liechtenstein
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Thermal conductivity gauges are ubiquitous in vacuum industry. In the form of Pirani gauges they are a mainstay of cost-effective measurement in the fine vacuum range. Different realizations of the Pirani gauge will be discussed from the classical heated wire sensor to the newer micromachined sensors. We will review not only basic parameters such as measurement range and sensitivity but also topics interesting for industrial applications such as dynamical response, robustness and inertness in industrial processes.