AVS 58th Annual International Symposium and Exhibition
    Tribology Focus Topic Thursday Sessions
       Session TR-ThP

Paper TR-ThP2
The Lubrication Characteristics of Molybdenum Disulfide Films by RF Magnetron Sputter

Thursday, November 3, 2011, 6:00 pm, Room East Exhibit Hall

Session: Tribology Focus Topic Poster Session
Presenter: Akira Kasahara, National Institute for Materials Science (NIMS), Japan
Authors: A. Kasahara, National Institute for Materials Science (NIMS), Japan
M. Goto, National Institute for Materials Science (NIMS), Japan
M. Tosa, National Institute for Materials Science (NIMS), Japan
T. Maruyama, Toyama Co., Ltd., Japan
J. Nakagawa, Toyama Co., Ltd., Japan
K. Endo, Toyama Co., Ltd., Japan
Correspondent: Click to Email
For vacuum applications, lubricants which have low vapor pressure and good tribological performance are required. Solid lubricants have been widely adopted for vacuum applications due to their low vapor pressure. Thin film lubricants and high-temperature solid lubricants are discussed as the latest alternatives to fluorine grease. These lubricants feature lower out-gassing for clean and vacuum environments. One big drawback of solid lubrication is limited life. We investigate solid lubricant in order to develop high performance ultra-high vacuum (UHV) manipulation mechanism and high-temperature drive devices. We focused sputtering coating method and Molybdenum Disulfide (MoS2) , since this material has been reported to be suitable in vacuum , but not well been investigated. As a first step, we have carried out basic study of MoS2 thin film to find out suitable sputtering parameter.　It was deposited on martensite stainless steel (SUS440C) substrates, using radio frequency magnetron sputter. Their tribological characteristics in UHV and high-temperature was evaluated by vacuum friction measurement system, high-temperature friction measurement system based on Bowden-Leben type and abrasion measurements by Stylus Surface Profiler.