| AVS 58th Annual International Symposium and Exhibition | |
| Tribology Focus Topic | Thursday Sessions |
| Session TR-ThA |
| Session: | Advanced Tribological Materials |
| Presenter: | Joerg Paulitsch, Montanuniversität Leoben, Austria |
| Authors: | J. Paulitsch, Montanuniversität Leoben, Austria C. Maringer, Montanuniversität Leoben, Austria D. Holec, Montanuniversität Leoben, Austria P.H. Mayrhofer, Montanuniversität Leoben, Austria |
| Correspondent: | Click to Email |
Deposition processes like the high power impulse magnetron sputtering (HIPIMS) indicate high metal ion ratios in the plasma, which result in increased structural and mechanical properties. The generally low deposition rate, compared to direct current magnetron sputtering (DCMS), narrows the industrial application range of this technology. The modulated pulse power (MPP) deposition technique on the other hand uses multiple complex pulsing steps to increase the metal ion ratio in the plasma without dramatically reducing the deposition rates as compared to DCMS.
Recently we showed that a multilayer architecture of CrN and TiN, deposited using the hybrid HIPIMS/DCMS deposition technique, results in coatings exhibiting friction coefficients in the range of diamond-like-carbon (DLC) coatings when tested at RT and ambient air conditions. Here we show results of MPP/DCMS deposited CrN/TiN multilayer coatings indicating comparable mechanical and tribological properties, hardness values around 25 GPa and coefficient of friction below 0.05. Furthermore, investigations on their dependence to the atmospheric conditions used during dry sliding as well as theoretical investigations of the layered structure using density function theory simulations were carried out.