AVS 58th Annual International Symposium and Exhibition | |
Thin Film Division | Wednesday Sessions |
Session TF2+EM-WeA |
Session: | Nanostructuring Thin Films |
Presenter: | AnnaMaria Coclite, Massachusetts Institute of Technology |
Authors: | A.M. Coclite, Massachusetts Institute of Technology K.K. Gleason, Massachusetts Institute of Technology |
Correspondent: | Click to Email |
Barrier coatings, which prevent the permeation of water into OPV devices fabricated on flexible plastic substrates, are essential to extend the device lifetime. Such protective coatings are made of multilayer stacks where multiple dense, inorganic layers are alternated with soft, organic ones. The inorganic layer contains inevitably some pinholes and defects. The roles of the organic layer are (i) creating a tortuous and longer path among the defects of two successive inorganic layers (ii) filling the pores of the inorganic underlayer limiting the propagation of defects from one inorganic layer to the other and (iii) smoothening the substrate surface roughness.
In the past, we obtained good barrier properties (WVTR= 10-2 g/cm2/day) with a hexalayer obtained by coupling initiated CVD (iCVD) and plasma enhanced CVD (PECVD). iCVD layers resulted in effective defect decoupling and good planarization of the substrate.1
Now a similar approach is investigated for the multilayer deposition in a large-area reactor (0.16 m3), maintaining the same organosilicon precursor and the same reactor configuration for both deposition of silica-like and organosilicon layers.
SiOx layers were deposited through PECVD in MW plasma at high power and high oxygen dilution. The silanol and organic groups were not detectable by IR spectroscopy, resulting in denser film if compared with the previous results.
A new process was used for the formation of organosilicon polymers with enhanced monomer structure retention compared to a conventional plasma deposition and faster deposition rate if compared to conventional iCVD processes from organosilicon monomer. We demonstrate that the monomer molecule remains substantially preserved in fact the C/Si ratio calculated from XPS data on the polymer was 4.3, close to the 3.7 C/Si elemental ratio of the monomer molecule.
The deposition of smoothening organic layers is demonstrated by depositing the coating on the top of a microsphere (1 µm in diameter) monolayer deposited over silicon wafers. Increasing the thickness of the coating, the degree of planarization (DP), both local (DLP) and global (DGP), increases. The DLP increases much faster than the DGP: when the coating is 1µm-thick the DLP is already 99%, for the global planarization instead a 1.8µm-thick-coating is needed to reach DGP= 99%.
The high density of the inorganic layer, the smoothness and planarization properties of the organic one make this approach particularly promising for the deposition of effective multilayer barrier coatings.
1 Coclite, Ozaydin-Ince, Palumbo, Milella, Gleason, Plasma Proc. Polym., 2010, 7, pp. 561