AVS 58th Annual International Symposium and Exhibition
    Thin Film Division Friday Sessions
       Session TF-FrM

Paper TF-FrM5
Cubic ZnMgO and NiMgO for UV-C Applications

Friday, November 4, 2011, 9:40 am, Room 110

Session: Thin Films: Growth and Characterization II
Presenter: R. Casey Boutwell, University of Central Florida
Authors: R.C. Boutwell, University of Central Florida
J.W. Mares, University of Central Florida
M. Wei, University of Central Florida
W.V. Schoenfeld, University of Central Florida
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We will report on two new ternary cubic oxides offering close lattice matching to MgO, ZnMgO and NiMgO, and compare the properties of films grown by both RF Plasma-Assisted MBE and a much more economical sol-gel deposition process. Using both methods we have successfully demonstrated band gap tuning in the UV-C spectral region, with ZnMgO films producing band gaps ranging from ~5eV to 7.8eV and NiMgO films having band gaps ranging from 3.5eV to 7.8 eV. XRD revealed 2θ FWHM values as narrow as 0.19°, and atomic force microscopy of ZnMgO films demonstrated surface roughness of 3.4nm with NiMgO films having roughness below 1Å. Optical, compositional, and morphological results from films produced using both synthesis methods will be presented. We will also report on initial photodetectors with 5µm interdigitated fingers that produced peak responsivities of 12 mA/W at 250 nm.