AVS 58th Annual International Symposium and Exhibition
    Advanced Surface Engineering Division Wednesday Sessions
       Session SE+PS-WeA

Paper SE+PS-WeA10
Dense Atmospheric Pressure Discharges for Surface and Gas Treatment

Wednesday, November 2, 2011, 5:00 pm, Room 104

Session: Atmospheric Pressure Plasmas
Presenter: Jason Kelly, International Technology Center
Authors: M.J. Kelly, International Technology Center
B.D. Schultz, International Technology Center
W.M. Hooke, International Technology Center
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Dielectric barrier discharge (DBD) plasmas have been formed in atmospheric pressure gases exhibiting peak currents in excess of 100 amperes. Power densities during the pulse routinely exceed 100 kilowatts per cubic centimeter for moderately sized electrodes (>100 square centimeters) with ionization densities of 1014 per cubic centimeter. Charge transfer of 100 microcoulombs per pulse has been repeatedly generated at frequencies up to 100 hertz, and the charge delivery is found to scale in proportion to the electrode area for a given dielectric consistent with a homogeneous discharge. Diffuse discharges have been formed over larger areas (exceeding 1 meter in length and 500 square centimeters) as well. These results were obtained using a custom high voltage driving source and in the absence of helium, argon, or any other easily ionized gas. The source readily achieves an overvoltage in excess of the DC breakdown voltage prior to the onset of breakdown in which 20-30 kV is delivered with rise times shorter than the lag time between the pulse crossing the threshold voltage and the onset of a discharge. Electrical modeling of the discharge characteristics has produced correlations relating power and charge transfer to various electrical and geometrical parameters of the system which will be discussed in this paper.