AVS 58th Annual International Symposium and Exhibition
    Plasma Science and Technology Division Thursday Sessions
       Session PS-ThP

Paper PS-ThP7
Properties and Performance of TiN, TiCN Coatings on Stainless Steel for Commercial Production Equipment

Thursday, November 3, 2011, 6:00 pm, Room East Exhibit Hall

Session: Plasma Science and Technology Poster Session
Presenter: YuiLun Wu, University of Illinois at Urbana Champaign
Authors: Y.L. Wu, University of Illinois at Urbana Champaign
J.M. Hong, University of Illinois at Urbana Champaign
T.S. Cho, University of Illinois at Urbana Champaign
D.N. Ruzic, University of Illinois at Urbana Champaign
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Commercial production equipment coated with TiN and TiCN films were studied experimentally and their material properties and performance were characterized in detail. The goal is to produce a titanium nitride and titanium cabonitride coating on bare stainless steel surfaces that can resist material adhesion on the equipment surfaces. TiN and TiCN were chosen as the coating material due to their superior performance of low friction coefficient and high wear resistivity. Previous studies have shown that the friction coefficient of the coatings could be as low as 0.15 and wear rate of 6×10-6 mm3N-1m-1 whereas the friction coefficient was 0.6 and the wear rate was about 3 orders of magnitude higher for the bare stainless steel surfaces. In this study the TiN and TiCN coatings were made using magnetron reactive sputtering using a titanium target of 300mm in diameter and 1cm thickness with methane and nitrogen as reactive gases. The coating properties were characterized tribology testing. Adhesions of the coatings on equipment surfaces were determined with single-pass scratch tests and the friction coefficients and wear rates were found using pin-on-disc tests. Resistivity on gum base materials were also characterized with the amount of adhered gum based materials and contact angle measurements.